UMS CO., LTD.
Patent Owner
Stats
- 1 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jul 11, 2013 most recent publication
Details
- 1 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 78 Total Citation Count
- Oct 02, 2000 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
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Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2013/0174,868 METHOD FOR PURIFYING ALKALINE TREATMENT FLUID FOR SEMICONDUCTOR SUBSTRATE AND A PURIFICATION APPARATUSAbandonedSep 26, 11Jul 11, 13[B01J]
6699330 Method of removing contamination adhered to surfaces and apparatus used thereforExpiredOct 02, 00Mar 02, 04[C23G]
6696228 Method and apparatus for removing organic filmsExpiredOct 21, 02Feb 24, 04[C03C, B08B, C23G, G03F]
Top Inventors for This Owner
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